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Jurca, T., Moody, M. J., Henning, A., Emery, J. D., Wang, B., Tan, J. M., … Marks, T. J. (2017). Low-Temperature Atomic Layer Deposition of MoS2 Films. Angewandte Chemie International Edition, 56(18), 4991–4995. doi:10.1002/anie.201611838 

10.1002/anie.201611838