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Burns, D. W., Zook, J. D., Horning, R. D., Herb, W. R., & Guckel, H. (1995). Sealed-cavity resonant microbeam pressure sensor. Sensors and Actuators A: Physical, 48(3), 179–186. doi:10.1016/0924-4247(95)00997-3 

10.1016/0924-4247(95)00997-3